Leybold - Balzers - BPS - glass coaters - batch coater - sputter
 

experience in vacuum technology

 

retrofit of ZV6000

example

Modular concept

Up to 6 cathodes PK500 (500x88mm)

Substrate size up to 450x450mm

Very low particles because of vertical design and singular bottom substrate drive.

ZV6000retro

 
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  • Complete system overhaul,

  • new VisualZ control system,

  • new carrier position detection,

  • etching capability added / 2.5kW RF generator . automatching

    Please ask for details.  
    info2@ibb-automation.de

 
drive replacement for vacuum coaters

Dipl.-Ing. K.-P. Bahlk
Bingenheimer Straße 32
D-61203 Reichelsheim
Tel.: +49 6035 917740
Fax: +49 6035 917742

 
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