experience in vacuum technology

retrofit of ZV6000

example

Modular concept

Up to 6 cathodes PK500 (500x88mm)

Substrate size up to 450x450mm

Very low particles because of vertical design and singular bottom substrate drive.

• Complete system overhaul,

• new VisualZ control system,

• new carrier position detection,

• etching capability added / 2.5kW RF generator . automatching
  
  Please ask for details.